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slideserve.com
PPT - Plasma-Enhanced Chemical Vapor Deposition (PECVD) PowerPoint Presentation - ID:1586567
Plasma-Enhanced Chemical Vapor Deposition (PECVD). Epitaxial Thin Film Growth Emil Blix Wisborg. What is CVD?. Chemical Vapor Deposition Deposition of a solid phase from a gaseous phase Volatile precursor gases react or decompose on a heated substrate
Jul 15, 2014
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